• Improved Polishing Particle Uniformity

  • ▪ Improved Polishing Rate and Yield
  • ▪ Ensures Stable CMP Process

• Waste Slurry Capture Feature

  • ▪ Shortened Regeneration Efficiency and Processing Time
  • ▪ Extended Lifespan of Regeneration Equipment and SAVE on Processing Costs

• Chemical Composition Ratio Restoration Function

  • ▪ Environmental Protection through Chemical Recovery, Processing, and Reuse
  • ▪ Chemical Treatment Cost Reduction Effect

• Polishing Particle Separation Technology

  • ▪ Prevents Large Particle Formation Among Polishing Particles
  • ▪ Prevents Sedimentation/Settling Caused by Inter-Particle Aggregation

• Purification Treatment

  

  Water treatment chemicals are injected and agitated to chemically react, resulting in the coagulation and separation of water pollutants for discharge.

  Increased Processing Costs

• Dewatering/Landfilling

  

  Aggregates formed in the reactor settle via gravity, are transferred to a dewatering system, solidified (as sludge), and disposed of.

  ESH Issues

• Regeneration Treatment

  

  Effective polishing particles or chemical substances in the slurry are purified for reuse in the process; this involves removing contaminants through a purification process to obtain pure slurry.

  Environmental Protection + Cost Reduction

Turning Waste into Resources,
Changing the Future of Semiconductors.

High-Efficiency Regeneration with Electric-Sonic Fusion Technology